The analysis of oxygen plasma pretreatment for improving anodic bonding

Seung Woo Choi, Woo Beom Choi, Yun Hi Lee, Byeong Kwon Ju, Man Young Sung, Byong Ho Kim

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds