The deposition of intrinsic hydrogenated amorphous silicon thin films incorporated with oxygen by plasma-enhanced vapor deposition

Ji Eun Lee, Joo Hyung Park, Jinsu Yoo, Kyung Hoon Yoon, Donghwan Kim, Jun Sik Cho

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy