The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing

Ki Yeon Yang, Kyung Min Yoon, Kyung Woo Choi, Heon Lee

Research output: Contribution to journalArticle

51 Citations (Scopus)

Abstract

Nano-patterned ZnO layer was fabricated by ZnO-sol imprinting with a polymeric mold, followed by annealing. Instead of polymer based imprint resin, ZnO-sol was used as an imprint resin. During the imprinting process, the organic solvent in the ZnO-sol was absorbed into a polymeric mold and thus, ZnO-sol was converted to ZnO-gel. These patterns were subsequently annealed at 650 °C for 1 h in atmospheric ambient to form ZnO patterns. X-ray diffraction (XRD) and photoluminescence (PL) confirmed that ZnO-gel was completely converted into ZnO by annealing. Using this ZnO-sol imprinting method, ZnO nano-patterns, as small as 50 nm, were fabricated on Si and oxidized Si wafer substrates. The ZnO nano-patterns were characterized using scanning electron microscopy (SEM) and Transmission electron microscopy (TEM).

Original languageEnglish
Pages (from-to)2228-2231
Number of pages4
JournalMicroelectronic Engineering
Volume86
Issue number11
DOIs
Publication statusPublished - 2009 Nov 1

Fingerprint

Nanoimprint lithography
Polymethyl Methacrylate
Sols
lithography
Annealing
annealing
resins
gels
Gels
Resins
Organic solvents
wafers
Photoluminescence
photoluminescence
Polymers
transmission electron microscopy
scanning electron microscopy
Hot Temperature
polymers
Transmission electron microscopy

Keywords

  • Nanoimprint lithography
  • ZnO nano-pattern
  • ZnO-gel
  • ZnO-sol

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

Cite this

The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing. / Yang, Ki Yeon; Yoon, Kyung Min; Choi, Kyung Woo; Lee, Heon.

In: Microelectronic Engineering, Vol. 86, No. 11, 01.11.2009, p. 2228-2231.

Research output: Contribution to journalArticle

Yang, Ki Yeon ; Yoon, Kyung Min ; Choi, Kyung Woo ; Lee, Heon. / The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing. In: Microelectronic Engineering. 2009 ; Vol. 86, No. 11. pp. 2228-2231.
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