TY - JOUR
T1 - The effect of carbon-doped In3Sb1Te2 ternary alloys for multibit (MLC) phase-change memory
AU - Kim, Hyun Soo
AU - Kim, Yong Tae
AU - Hwang, Ha Sub
AU - Sung, Man Young
PY - 2014/1/1
Y1 - 2014/1/1
N2 - One of the candidate materials for phase-change memory, In3Sb1Te2 (IST), shows multilevel phase transformations from amorphous to several crystalline materials of IST, intermediate phases such as InSb, SbTe and InTe. However, its volume can change abruptly in the multilevel phase transformation, and this change can lead to vacancy movement and atomic migration, which are related to failures and reliability issues. We propose the carbon-incorporated In3Sb1Te2 (IST-C) alloy, which has higher retention ability than the IST ternary alloy. Carbon atoms delay crystallization and prevent volume change during the set/reset operation. The carbon concen- tration is 12.5%, and the activation energy increases from 5.1 eV to 5.4 eV.
AB - One of the candidate materials for phase-change memory, In3Sb1Te2 (IST), shows multilevel phase transformations from amorphous to several crystalline materials of IST, intermediate phases such as InSb, SbTe and InTe. However, its volume can change abruptly in the multilevel phase transformation, and this change can lead to vacancy movement and atomic migration, which are related to failures and reliability issues. We propose the carbon-incorporated In3Sb1Te2 (IST-C) alloy, which has higher retention ability than the IST ternary alloy. Carbon atoms delay crystallization and prevent volume change during the set/reset operation. The carbon concen- tration is 12.5%, and the activation energy increases from 5.1 eV to 5.4 eV.
KW - Carbon
KW - Doping
KW - HRTEM
KW - Phase-change memory
KW - Transmission electron microscopy
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U2 - 10.1002/pssr.201308211
DO - 10.1002/pssr.201308211
M3 - Article
AN - SCOPUS:84896032014
VL - 8
SP - 243
EP - 247
JO - Physica Status Solidi - Rapid Research Letters
JF - Physica Status Solidi - Rapid Research Letters
SN - 1862-6254
IS - 3
ER -