Fingerprint
Dive into the research topics of 'The effect of CeO<sub>2</sub> abrasive size on dishing and step height reduction of silicon oxide film in STI-CMP'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
The effect of CeO2 abrasive size on dishing and step height reduction of silicon oxide film in STI-CMP
D. S. Lim, J. W. Ahn, H. S. Park, J. H. Shin
Research output: Contribution to journal › Article › peer-review
65
Citations
(Scopus)