Carbide-derived carbon (CDC) films were synthesized on sintered SiC by selective etching at high temperatures. Iron particles were used as a catalyst during the high temperature chlorination process to examine the effect of the catalytic particles on the structure and tribological behavior of CDC films. Chlorination was carried out at temperatures ranging from 1000 to 1200 °C. The structure of the synthesized CDC was characterized and examined by Raman spectroscopy, transmission and scanning electron microscopy. The surface features of the films were analyzed using Auger electron spectroscopy. The results showed that the thickness did not change but the crystallinity was increased by adding the iron catalyst. No significant changes in the coefficient of friction were observed. The wear rate was reduced by adding the catalyst but the decrease was minimized by increasing the processing temperature up to 1150 °C. The observed improvement in the wear resistance was attributed to the increase in hardness as a result of the increase in crystalline phases, such as carbon nanotubes and onion like carbon, due to the presence of the iron catalyst.
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