The effects of film thickness on the electrical, optical, and structural properties of cylindrical, rotating, magnetron-sputtered ITO films

Jae Ho Kim, Tae Yeon Seong, Kyung Jun Ahn, Kwun Bum Chung, Hae Jun Seok, Hyeong Jin Seo, Han Ki Kim

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

We report the characteristics of Sn-doped In2O3 (ITO) films intended for use as transparent conducting electrodes; the films were prepared via a five-generation, in-line type, cylindrical, rotating magnetron sputtering (CRMS) system as a function of film thickness. By using a rotating cylindrical ITO target with high usage (∼80%), we prepared high conductivity, transparent ITO films on five-generation size glass. The effects of film thickness on the electrical, optical, morphological, and structural properties of CRMS-grown ITO films are investigated in detail to correlate the thickness and performance of ITO films. The preferred orientation changed from the (2 2 2) to the (4 0 0) plane with increasing thickness of ITO is attributed to the stability of the (4 0 0) plane against resputtering during the CRMS process. Based on X-ray diffraction, surface field emission scanning electron microscopy, and cross-sectional transmission electron microscopy, we suggest a possible mechanism to explain the preferred orientation and effects of film thickness on the performance of CRMS-grown ITO films.

Original languageEnglish
Pages (from-to)1211-1218
Number of pages8
JournalApplied Surface Science
Volume440
DOIs
Publication statusPublished - 2018 May 15

Keywords

  • Cylindrical rotating magnetron sputtering
  • Preferred orientation
  • Sn-doped InO
  • Thickness
  • Transparent conducting electrodes

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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