The Impact of an Ultrathin Y2O3 Layer on GeO2 Passivation in Ge MOS Gate Stacks

Yujin Seo, Tae In Lee, Chang Mo Yoon, Bo Eun Park, Wan Sik Hwang, Hyungjun Kim, Hyun Yong Yu, Byung Jin Cho

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds