The influence of fluids on the microhardness of single crystal silicon

Soo Wohn Lee, Dae Soon Lim, Steven Danyluk

Research output: Contribution to journalArticle

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)651-653
Number of pages3
JournalJournal of Materials Science Letters
Volume3
Issue number7
DOIs
Publication statusPublished - 1984 Jul

ASJC Scopus subject areas

  • Materials Science(all)

Cite this