The influence of sintering additives on the lifetime of the heater for sensor application with Al2O3 substrate

Kyo Yeol Lee, Jong Heun Lee, Ho In Kim, Ki Woo Han, Jong Mok Park

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A micro-heater was fabricated by co-firing the laminates of Al2O3 green sheets with Pt heater pattern and its lifetime characteristics were studied in relation to the substrate conditions by varying the sintering temperatures and the sintering additives such as MgO, CaO, and SiO2. The MgO-doped heater showed the longer lifetime than undoped, CaO-doped or SiO2-doped ones, and the heater lifetime increased with the sintering temperature. This arose from the improvement of connectivity and homogeneity of the Pt pattern by the densification of Pt particles or Al2O3 substrate. The migration of the Mg2+ ion toward the negative electrode was observed as a darkened phase and analyzed by micro-compositional analysis in the heater operated at high temperature. Its tendency was proportional to increasing the MgO doping into high purity Al2O3. The desirable amount of MgO doping was 7 mol% both for prevention of Mg2+ ion migration and for increasing heater lifetime.

Original languageEnglish
Pages (from-to)90-97
Number of pages8
JournalMaterials Letters
Volume37
Issue number1-2
DOIs
Publication statusPublished - 1998 Sep
Externally publishedYes

Keywords

  • AlO
  • Heater lifetime
  • Ion migration
  • MgO
  • Micro-heater

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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