The millimeter-wave detector using vanadium oxide with planar structure antenna

Ji Hong Kim, Sung Min Hong, Kyung Il Lee, Dae Sung Lee, Byung Moo Moon, Hak In Hwang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have developed a new millimeter-wave detector. The detector consists of a micro bolometric detecting part, a micro heater and a micro antenna. Vanadium oxide thin film was deposited for thermal detecting materials. The micro log-periodic bow-tie antenna having resonance frequency of 140GHz was designed and simulated. The antenna coupled detectors were fabricated by MEMS technology. The fabricated detector showed resonance frequency of 140GHz which is the same as simulation result and large TCR value of 4%.

Original languageEnglish
Title of host publication33rd International Conference on Infrared and Millimeter Waves and the 16th International Conference on Terahertz Electronics, 2008, IRMMW-THz 2008
DOIs
Publication statusPublished - 2008
Event33rd International Conference on Infrared and Millimeter Waves and the 16th International Conference on Terahertz Electronics, 2008, IRMMW-THz 2008 - Pasadena, CA, United States
Duration: 2008 Sept 152008 Sept 19

Publication series

Name33rd International Conference on Infrared and Millimeter Waves and the 16th International Conference on Terahertz Electronics, 2008, IRMMW-THz 2008

Other

Other33rd International Conference on Infrared and Millimeter Waves and the 16th International Conference on Terahertz Electronics, 2008, IRMMW-THz 2008
Country/TerritoryUnited States
CityPasadena, CA
Period08/9/1508/9/19

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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