Global production for NF<inf>3</inf> is continuously increasing, especially due to its heavy consumption in the semiconductor industry. Even though the amount of its emission is relatively small compared to other greenhouse gases, particularly CO<inf>2</inf>, the relatively long atmospheric lifetime of NF<inf>3</inf> makes its emission cumulative, possibly contributing to the global climate change. Membrane-based separation techniques are very promising for the energy-efficient NF<inf>3</inf> recovery. It is, therefore, critically important to evaluate the N<inf>2</inf>/NF<inf>3</inf> separation performance by using commercial polymeric membranes. Here, for the first time, the empirical N<inf>2</inf>/NF<inf>3</inf> upper bound relationship is established by using a wide variety of commercial polymeric membranes including both glassy and rubbery polymers based on their single gas (i.e. N<inf>2</inf> and NF<inf>3</inf>) permeation characterization. Among those tested, 6FDA-DAM:DABA (3:2), Teflon<sup>®</sup> AF 2400 and PTMSP exhibited relatively high N<inf>2</inf>/NF<inf>3</inf> separation performance. The theoretical N<inf>2</inf>/NF<inf>3</inf> upper bound curve was also defined and found comparable with our empirical upper bound limit. In an effort to improve the N<inf>2</inf>/NF<inf>3</inf> separation performance, mixed matrix membranes were prepared by incorporating zeolitic imidazolate framework molecular sieves into Matrimid<sup>®</sup> 5218. The effects of solvents, particle sizes, and ligands on the transport properties in mixed matrix membranes were investigated.
- Mixed matrix membranes
- N<inf>2</inf>/NF<inf>3</inf> separation
- Polymeric upper bound
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Materials Science(all)
- Filtration and Separation