The selective growth of carbon nanotubes on hole-pattern by thermal chemical vapor deposition

Yoon Huh, Jeong Yong Lee, Tae Jae Lee, Seung Chul Lyu, Cheol Jin Lee

Research output: Contribution to journalArticle

3 Citations (Scopus)


Hole patterns were fabricated on SiO2/Si substrate by a conventional lithography method using photo-resist, and iron was deposited on a substrate by RF sputtering. We have synthesized vertically-aligned carbon nanotubes which were selectively grown on the iron-deposited hole patterns by thermal chemical vapor deposition of C2H2 gas at 750 ∼ 850 °C. The carbon nanotubes selectively grown on hole patterns are applicable to a field emission display of triode type. We confirmed the growth of the carbon nanotubes using scanning electron microscopy.

Original languageEnglish
JournalJournal of the Korean Physical Society
Issue numberSPEC.
Publication statusPublished - 2003 Feb 1
Externally publishedYes



  • Carbon nanotube
  • Field emission
  • Hole pattern
  • Thermal CVD

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this