The selective growth of carbon nanotubes on hole-pattern by thermal chemical vapor deposition

Yoon Huh, Jeong Yong Lee, Tae Jae Lee, Seung Chul Lyu, Cheol Jin Lee

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Abstract

Hole patterns were fabricated on SiO2/Si substrate by a conventional lithography method using photo-resist, and iron was deposited on a substrate by RF sputtering. We have synthesized vertically-aligned carbon nanotubes which were selectively grown on the iron-deposited hole patterns by thermal chemical vapor deposition of C2H2 gas at 750 ∼ 850 °C. The carbon nanotubes selectively grown on hole patterns are applicable to a field emission display of triode type. We confirmed the growth of the carbon nanotubes using scanning electron microscopy.

Original languageEnglish
JournalJournal of the Korean Physical Society
Volume42
Issue numberSPEC.
Publication statusPublished - 2003 Feb 1
Externally publishedYes

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Keywords

  • Carbon nanotube
  • Field emission
  • Hole pattern
  • Thermal CVD

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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