The selective growth of carbon nanotubes on hole-pattern by thermal chemical vapor deposition

Yoon Huh, Jeong Yong Lee, Tae Jae Lee, Seung Chul Lyu, Cheol Jin Lee

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

Hole patterns were fabricated on SiO2/Si substrate by a conventional lithography method using photo-resist, and iron was deposited on a substrate by RF sputtering. We have synthesized vertically-aligned carbon nanotubes which were selectively grown on the iron-deposited hole patterns by thermal chemical vapor deposition of C2H2 gas at 750 ∼ 850 °C. The carbon nanotubes selectively grown on hole patterns are applicable to a field emission display of triode type. We confirmed the growth of the carbon nanotubes using scanning electron microscopy.

Original languageEnglish
Pages (from-to)S732-S734
JournalJournal of the Korean Physical Society
Volume42
Issue numberSPEC.
Publication statusPublished - 2003 Feb
EventProceedings of The 11th Seoul International Symposium on the Physics of Semiconductors and Apllications - 2002 - Cheju Island, Korea, Republic of
Duration: 2002 Aug 202002 Aug 23

Keywords

  • Carbon nanotube
  • Field emission
  • Hole pattern
  • Thermal CVD

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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