The spontaneous metal-sitting structure on carbon nanotube arrays positioned by inkjet printing for wafer-scale production of high sensitive gas sensor units

Joondong Kim, Ju Hyung Yun, Jin Won Song, Chang-Soo Han

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Highly sensitive single wall carbon nanotube (CNT)-embedded gas sensor units were fabricated by the mass production scheme. The wafer-scale produced sensor units provide repeatable sensing performances to 10 ppb level of NO 2 and the distinctive response to CO. Inkjet approach was applied to deposit CNTs to be arrayed on a 4 in. wafer at designated positions and controlled the density of CNT arrays with reliable accuracy. Metal deposition above the CNT arrays forms the metal-sitting structure providing a good Ohmic contact formation, which also ensures the active CNT responses to gas molecules with less effect from the metal contacts. We discuss the reaction mechanism of CNTs to gas species and mass production schemes of sensor units on a wafer-scale.

Original languageEnglish
Pages (from-to)587-591
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume135
Issue number2
DOIs
Publication statusPublished - 2009 Jan 15
Externally publishedYes

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Keywords

  • Carbon nanotube arrays
  • CO
  • Gas sensor units
  • Inkjet printing
  • Metal-sitting passivation
  • NO
  • Wafer-scale

ASJC Scopus subject areas

  • Instrumentation
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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