Thermal imprint lithography using sub-micron sized nickel template coated with thin SiO2 layer

Kyeong Jae Byeon, Ki Yeon Yang, Heon Lee

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Nickel template is very suitable for thermal imprinting process since it has high mechanical durability and can easily be duplicated using electroforming technique. However nickel has a poor anti-sticking property; in addition, proper and stable releasing layer on nickel surface is not yet available. In this study, thin layer of SiO2 film was deposited on nickel surface and silane based hydrophobic self-assembled monolayer (SAM) was formed on SiO2 film, coated on nickel. Since the silane based SAM layer can be stably formed on SiO2 layer coated nickel template, it can be used anti-sticking layer for thermal imprint process using thermoplastic polymer resin or thermally curable prepolymer resin.

Original languageEnglish
Pages (from-to)1003-1006
Number of pages4
JournalMicroelectronic Engineering
Volume84
Issue number5-8
DOIs
Publication statusPublished - 2007 May 1

Fingerprint

Nickel
Lithography
templates
lithography
nickel
Silanes
Self assembled monolayers
silanes
resins
Resins
prepolymers
Electroforming
electroforming
releasing
durability
Thermoplastics
Hot Temperature
Polymers
Durability
polymers

Keywords

  • Anti-sticking coating
  • Nanoimprint lithography
  • Nickel template
  • Silane based SAM

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics

Cite this

Thermal imprint lithography using sub-micron sized nickel template coated with thin SiO2 layer. / Byeon, Kyeong Jae; Yang, Ki Yeon; Lee, Heon.

In: Microelectronic Engineering, Vol. 84, No. 5-8, 01.05.2007, p. 1003-1006.

Research output: Contribution to journalArticle

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