Thermal stability of Pd supported on single crystalline SiO 2 thin films

Byoung Koun Min, A. K. Santra, D. W. Goodman

Research output: Contribution to journalArticle

21 Citations (Scopus)


The thermal stability of palladium (Pd) supported on single crystalline SiO 2 thin films was investigated. Auger electron spectroscopy (AES) and scanning tunneling microscopy were used to determine the effect of annealing temperature on the model Pd/SiO 2 catalyst. It was observed that the Pd clusters on the SiO 2 thin films were unaltered with respect to size or shape upon heating to 700 K, but interdiffusion and sintering of the Pd clusters occured between 750 and 1050 K. Desorption of Pd was found to take place concomitantly with the deposition of SiO 2 at temperatures above 1050 K.

Original languageEnglish
Pages (from-to)2319-2323
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number6
Publication statusPublished - 2003 Nov 1
Externally publishedYes


ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

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