Thermally stable and low resistance Re/Ti/Au ohmic contacts to n-ZnO

Sang Ho Kim, Kyoung Kook Kim, Seong Ju Park, Tae Yeon Seong

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

We report on the formation of thermally stable ohmic contacts on n-type ZnO:Al (nd = 2 × 1018 cm-3) using a Re/Ti/Au metallization scheme. It is shown that the as-deposited Re/Ti/Au contact is ohmic with a contact resistivity of 2.1 × 10-4 Ω cm2. The electrical characteristics of the samples are further improved upon annealing, namely, the sample produces a specific contact resistance of 1.7 × 10-7 Ω cm2 when annealed at 700°C for 1 min in a nitrogen ambient. Atomic force microscopy results show that the surface of the samples is reasonably smooth with a root-mean-square roughness of 6.0 nm when annealed at 700°C. The carrier transport mechanism is described using the relationship between temperature and specific contact resistance. Based on X-ray diffraction and X-ray photoemission spectroscopy results, the ohmic mechanism for the annealed samples is also described and discussed.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume152
Issue number3
DOIs
Publication statusPublished - 2005 Apr 8

Fingerprint

Ohmic contacts
low resistance
Contact resistance
electric contacts
Carrier transport
Photoelectron spectroscopy
X ray spectroscopy
Metallizing
contact resistance
Atomic force microscopy
Nitrogen
Surface roughness
Annealing
X ray diffraction
x rays
photoelectric emission
roughness
atomic force microscopy
nitrogen
Temperature

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Thermally stable and low resistance Re/Ti/Au ohmic contacts to n-ZnO. / Kim, Sang Ho; Kim, Kyoung Kook; Park, Seong Ju; Seong, Tae Yeon.

In: Journal of the Electrochemical Society, Vol. 152, No. 3, 08.04.2005.

Research output: Contribution to journalArticle

Kim, Sang Ho ; Kim, Kyoung Kook ; Park, Seong Ju ; Seong, Tae Yeon. / Thermally stable and low resistance Re/Ti/Au ohmic contacts to n-ZnO. In: Journal of the Electrochemical Society. 2005 ; Vol. 152, No. 3.
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