Thermodynamic prediction of SiC deposition in C3H 8-SiCl4-H2 system

Jun Woo Kim, Seong Min Jeong, Hyung Tae Kim, Kyung Ja Kim, Jong Heun Lee, Kyoon Choi

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds