Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices

Joo Won Lee, Young Min Kim, Jung Soo Park, Sung Jin Bea, Na Rae Kim, Jai Kyeong Kim, Jin-Jang, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Transparent thin composite films (TCFs) were deposited on OLED devices by means of RF sputtering method and their passivation-properties were evaluated by comparing to the e-beam evaporating method. This composite film formed by mixed ratio of MgO (3wt %): SiO 2 (1wt %) was developed from pallet as a source of e-beam evaporator to 6-inch size target for sputtering in order to apply for large-sized organic display devices. Water Vapor Transmission Rates (WVTR) of the deposited films were measured as a function of thickness to assess the effectiveness of this film as a passivation layer and it applied to real devices. From this study, we can confirm that the passivation layer formed by TCFs using RF sputtering method sufficiently shows the potentiality of application to passivation layer for organic display devices.

Original languageEnglish
Title of host publicationProceedings of International Meeting on Information Display
Pages1480-1483
Number of pages4
Volume2
Publication statusPublished - 2006
Event5th International Meeting on Information Display - Seoul, Korea, Republic of
Duration: 2005 Jul 192005 Jul 23

Other

Other5th International Meeting on Information Display
CountryKorea, Republic of
CitySeoul
Period05/7/1905/7/23

Fingerprint

Composite films
Passivation
Sputtering
Display devices
Thin films
Pallets
Organic light emitting diodes (OLED)
Evaporators
Water vapor

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Lee, J. W., Kim, Y. M., Park, J. S., Bea, S. J., Kim, N. R., Kim, J. K., ... Ju, B. K. (2006). Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices. In Proceedings of International Meeting on Information Display (Vol. 2, pp. 1480-1483)

Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices. / Lee, Joo Won; Kim, Young Min; Park, Jung Soo; Bea, Sung Jin; Kim, Na Rae; Kim, Jai Kyeong; Jin-Jang, ; Ju, Byeong Kwon.

Proceedings of International Meeting on Information Display. Vol. 2 2006. p. 1480-1483.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lee, JW, Kim, YM, Park, JS, Bea, SJ, Kim, NR, Kim, JK, Jin-Jang, & Ju, BK 2006, Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices. in Proceedings of International Meeting on Information Display. vol. 2, pp. 1480-1483, 5th International Meeting on Information Display, Seoul, Korea, Republic of, 05/7/19.
Lee JW, Kim YM, Park JS, Bea SJ, Kim NR, Kim JK et al. Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices. In Proceedings of International Meeting on Information Display. Vol. 2. 2006. p. 1480-1483
Lee, Joo Won ; Kim, Young Min ; Park, Jung Soo ; Bea, Sung Jin ; Kim, Na Rae ; Kim, Jai Kyeong ; Jin-Jang, ; Ju, Byeong Kwon. / Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices. Proceedings of International Meeting on Information Display. Vol. 2 2006. pp. 1480-1483
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