Abstract
Transparent thin composite films (TCFs) were deposited on OLED devices by means of RF sputtering method and their passivation-properties were evaluated by comparing to the e-beam evaporating method. This composite film formed by mixed ratio of MgO (3wt %): SiO 2 (1wt %) was developed from pallet as a source of e-beam evaporator to 6-inch size target for sputtering in order to apply for large-sized organic display devices. Water Vapor Transmission Rates (WVTR) of the deposited films were measured as a function of thickness to assess the effectiveness of this film as a passivation layer and it applied to real devices. From this study, we can confirm that the passivation layer formed by TCFs using RF sputtering method sufficiently shows the potentiality of application to passivation layer for organic display devices.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of International Meeting on Information Display |
| Pages | 1480-1483 |
| Number of pages | 4 |
| Volume | 2 |
| Publication status | Published - 2006 |
| Event | 5th International Meeting on Information Display - Seoul, Korea, Republic of Duration: 2005 Jul 19 → 2005 Jul 23 |
Other
| Other | 5th International Meeting on Information Display |
|---|---|
| Country | Korea, Republic of |
| City | Seoul |
| Period | 05/7/19 → 05/7/23 |
Fingerprint
ASJC Scopus subject areas
- Engineering(all)
Cite this
Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices. / Lee, Joo Won; Kim, Young Min; Park, Jung Soo; Bea, Sung Jin; Kim, Na Rae; Kim, Jai Kyeong; Jin-Jang, ; Ju, Byeong Kwon.
Proceedings of International Meeting on Information Display. Vol. 2 2006. p. 1480-1483.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices
AU - Lee, Joo Won
AU - Kim, Young Min
AU - Park, Jung Soo
AU - Bea, Sung Jin
AU - Kim, Na Rae
AU - Kim, Jai Kyeong
AU - Jin-Jang,
AU - Ju, Byeong Kwon
PY - 2006
Y1 - 2006
N2 - Transparent thin composite films (TCFs) were deposited on OLED devices by means of RF sputtering method and their passivation-properties were evaluated by comparing to the e-beam evaporating method. This composite film formed by mixed ratio of MgO (3wt %): SiO 2 (1wt %) was developed from pallet as a source of e-beam evaporator to 6-inch size target for sputtering in order to apply for large-sized organic display devices. Water Vapor Transmission Rates (WVTR) of the deposited films were measured as a function of thickness to assess the effectiveness of this film as a passivation layer and it applied to real devices. From this study, we can confirm that the passivation layer formed by TCFs using RF sputtering method sufficiently shows the potentiality of application to passivation layer for organic display devices.
AB - Transparent thin composite films (TCFs) were deposited on OLED devices by means of RF sputtering method and their passivation-properties were evaluated by comparing to the e-beam evaporating method. This composite film formed by mixed ratio of MgO (3wt %): SiO 2 (1wt %) was developed from pallet as a source of e-beam evaporator to 6-inch size target for sputtering in order to apply for large-sized organic display devices. Water Vapor Transmission Rates (WVTR) of the deposited films were measured as a function of thickness to assess the effectiveness of this film as a passivation layer and it applied to real devices. From this study, we can confirm that the passivation layer formed by TCFs using RF sputtering method sufficiently shows the potentiality of application to passivation layer for organic display devices.
UR - http://www.scopus.com/inward/record.url?scp=33847345651&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847345651&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33847345651
VL - 2
SP - 1480
EP - 1483
BT - Proceedings of International Meeting on Information Display
ER -