Thin composite film passivation through RF sputtering method for Large-sized organic Display Devices

Joo Won Lee, Young Min Kim, Jung Soo Park, Sung Jin Bea, Na Rae Kim, Jai Kyeong Kim, Jin-Jang, Byeong Kwon Ju

Research output: Contribution to journalConference article


Transparent thin composite films (TCFs) were deposited on OLED devices by means of RF sputtering method and their passivation-properties were evaluated by comparing to the e-beam evaporating method. This composite film formed by mixed ratio of MgO (3wt %): SiO2 (1wt %) was developed from pallet as a source of e-beam evaporator to 6-inch size target for sputtering in order to apply for large-sized organic display devices. Water Vapor Transmission Rates (WVTR) of the deposited films were measured as a function of thickness to assess the effectiveness of this film as a passivation layer and it applied to real devices. From this study, we can confirm that the passivation layer formed by TCFs using RF sputtering method sufficiently shows the potentiality of application to passivation layer for organic display devices.

Original languageEnglish
Pages (from-to)1480-1483
Number of pages4
JournalProceedings of International Meeting on Information Display
Publication statusPublished - 2006 Dec 1
Event5th International Meeting on Information Display - Seoul, Korea, Republic of
Duration: 2005 Jul 192005 Jul 23

ASJC Scopus subject areas

  • Engineering(all)

Cite this