Performance improvement, especially in the lower operating temperature regime, by employing thin film and nano-structure electrodes for miniaturized SOFCs is investigated. Anode-supported cells with thin (≤1 μm) YSZ electrolytes were fabricated by using pulsed laser deposition (PLD). Performance of the cell was characterized at temperatures lower than 600°C We obtained OCV > 1 V with less than 1 μm-thick thin electrolytes, which implied that the thin electrolyte was fairly dense and gas tight. The thin film electrolyte cells exhibited much improved cell performance than that of the anode-supported SOFC cell with a thick (-10 μm) YSZ electrolyte in the low operating temperature regime (350-550°C). The effects of the nano-structured electrodes and thin film electrolytes on the cell performance are investigated.