Tuning the thickness of exfoliated quasi-two-dimensional β-Ga2O3 flakes by plasma etching

Yongbeom Kwon, Geonyeop Lee, Sooyeoun Oh, Jihyun Kim, Stephen J. Pearton, Fan Ren

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)

Fingerprint Dive into the research topics of 'Tuning the thickness of exfoliated quasi-two-dimensional β-Ga<sub>2</sub>O<sub>3</sub> flakes by plasma etching'. Together they form a unique fingerprint.

Physics & Astronomy