Type conversion of boron-doped silicon wafers by 3-MeV proton irradiation

Min Doo Chun, Donghwan Kim, Jaebum Choo, Joo Youl Huh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint Dive into the research topics of 'Type conversion of boron-doped silicon wafers by 3-MeV proton irradiation'. Together they form a unique fingerprint.

Engineering & Materials Science