Ultralow-aspect-ratio micropore sensor for a particle translocation

Critical role of the access region

Jihun Ryu, Wook Choi, Eun Seok Jeon, Chang Woo Song, Chang-Soo Han

Research output: Contribution to journalArticle

Abstract

In this paper, we analyze particle translocation through micropores with low aspect ratios. Micropores with diameters of 11.6 μm and various lengths (1000 nm, 500 nm, 100 nm, and 50 nm) are fabricated on a silicon nitride membrane via laser machining at a low aspect ratio. After measuring the translocation signals of a 5.4- μm particle, we find that the effects of the access region become more significant than those of the pore region for detecting signals at low aspect ratios. To clarify this mechanism, finite element method simulation and mathematical analysis are performed and we describe the relationship between an inhomogeneous electric field and the critical role of the access region. Additionally, we detect the translocation signal of a double particle. As a result, we achieve a decrease in translocation speed and improve signal detection at an ultralow aspect ratio, demonstrating the potential to detect the shapes of small particles directly.

Original languageEnglish
Pages (from-to)454-459
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume288
DOIs
Publication statusPublished - 2019 Jun 1

Fingerprint

low aspect ratio
aspect ratio
Aspect ratio
sensors
Sensors
laser machining
applications of mathematics
signal detection
Signal detection
Silicon nitride
silicon nitrides
Machining
finite element method
Electric fields
membranes
Membranes
porosity
Finite element method
electric fields
Lasers

Keywords

  • Access resistance
  • Micropore sensor
  • Particle translocation
  • Ultralow-aspect-ratio

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Ultralow-aspect-ratio micropore sensor for a particle translocation : Critical role of the access region. / Ryu, Jihun; Choi, Wook; Jeon, Eun Seok; Song, Chang Woo; Han, Chang-Soo.

In: Sensors and Actuators, B: Chemical, Vol. 288, 01.06.2019, p. 454-459.

Research output: Contribution to journalArticle

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