Uncooled thermopile infrared detector with chromium oxide absorption layer

Sung Jun Lee, Yun Hi Lee, Sang Hi Suh, Byeong Kwon Ju, Myeong Hwan Oh, Young Je Oh, Tae Yoon Kim, Chul Ju Kim, Sung Jun Lee

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.

Original languageEnglish
Pages (from-to)24-28
Number of pages5
JournalSensors and Actuators, A: Physical
Volume95
Issue number1
DOIs
Publication statusPublished - 2001 Dec 15

Keywords

  • Anisotropic wet etching
  • Electro motive force
  • Infrared absorption
  • Thermal isolation
  • Thermopile

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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