Uncooled thermopile infrared detector with chromium oxide absorption layer

S. J. Lee, Yun-Hi Lee, S. H. Suh, Byeong Kwon Ju, T. Y. Kim, M. H. Oh, C. J. Kim, B. K. Ju

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.

Original languageEnglish
Pages (from-to)24-28
Number of pages5
JournalSensors and Actuators, A: Physical
Volume95
Issue number1
DOIs
Publication statusPublished - 2001 Dec 15
Externally publishedYes

Fingerprint

Thermopiles
thermopiles
chromium oxides
Infrared detectors
infrared detectors
Chromium
Infrared radiation
Oxides
Boron
Infrared absorption
Silicon
thermocouples
Thermocouples
Aluminum
infrared absorption
Light sources
absorptivity
boron
aluminum
output

Keywords

  • Anisotropic wet etching
  • Electro motive force
  • Infrared absorption
  • Thermal isolation
  • Thermopile

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Uncooled thermopile infrared detector with chromium oxide absorption layer. / Lee, S. J.; Lee, Yun-Hi; Suh, S. H.; Ju, Byeong Kwon; Kim, T. Y.; Oh, M. H.; Kim, C. J.; Ju, B. K.

In: Sensors and Actuators, A: Physical, Vol. 95, No. 1, 15.12.2001, p. 24-28.

Research output: Contribution to journalArticle

Lee, S. J. ; Lee, Yun-Hi ; Suh, S. H. ; Ju, Byeong Kwon ; Kim, T. Y. ; Oh, M. H. ; Kim, C. J. ; Ju, B. K. / Uncooled thermopile infrared detector with chromium oxide absorption layer. In: Sensors and Actuators, A: Physical. 2001 ; Vol. 95, No. 1. pp. 24-28.
@article{30d452e0880c452cb1cefdb8774cfe52,
title = "Uncooled thermopile infrared detector with chromium oxide absorption layer",
abstract = "In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.",
keywords = "Anisotropic wet etching, Electro motive force, Infrared absorption, Thermal isolation, Thermopile",
author = "Lee, {S. J.} and Yun-Hi Lee and Suh, {S. H.} and Ju, {Byeong Kwon} and Kim, {T. Y.} and Oh, {M. H.} and Kim, {C. J.} and Ju, {B. K.}",
year = "2001",
month = "12",
day = "15",
doi = "10.1016/S0924-4247(01)00743-9",
language = "English",
volume = "95",
pages = "24--28",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1",

}

TY - JOUR

T1 - Uncooled thermopile infrared detector with chromium oxide absorption layer

AU - Lee, S. J.

AU - Lee, Yun-Hi

AU - Suh, S. H.

AU - Ju, Byeong Kwon

AU - Kim, T. Y.

AU - Oh, M. H.

AU - Kim, C. J.

AU - Ju, B. K.

PY - 2001/12/15

Y1 - 2001/12/15

N2 - In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.

AB - In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.

KW - Anisotropic wet etching

KW - Electro motive force

KW - Infrared absorption

KW - Thermal isolation

KW - Thermopile

UR - http://www.scopus.com/inward/record.url?scp=0035892866&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035892866&partnerID=8YFLogxK

U2 - 10.1016/S0924-4247(01)00743-9

DO - 10.1016/S0924-4247(01)00743-9

M3 - Article

AN - SCOPUS:0035892866

VL - 95

SP - 24

EP - 28

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 1

ER -