Uncooled thermopile infrared detector with chromium oxide absorption layer

Sung Jun Lee; Yun-Hi Lee; Sang Hi Suh; Byeong Kwon Ju; Myeong Hwan Oh; Young Je Oh; Tae Yoon Kim; Chul Ju Kim; Sung Jun Lee

doi:10.1016/S0924-4247(01)00743-9

Uncooled thermopile infrared detector with chromium oxide absorption layer

Sung Jun Lee, Yun-Hi Lee, Sang Hi Suh, Byeong Kwon Ju, Myeong Hwan Oh, Young Je Oh, Tae Yoon Kim, Chul Ju Kim, Sung Jun Lee

Department of Physics

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.

Original language	English
Pages (from-to)	24-28
Number of pages	5
Journal	Sensors and Actuators, A: Physical
Volume	95
Issue number	1
DOIs	https://doi.org/10.1016/S0924-4247(01)00743-9
Publication status	Published - 2001 Dec 15

Keywords

Anisotropic wet etching
Electro motive force
Infrared absorption
Thermal isolation
Thermopile

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/S0924-4247(01)00743-9

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abstract = "In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.",

keywords = "Anisotropic wet etching, Electro motive force, Infrared absorption, Thermal isolation, Thermopile",

author = "Lee, {Sung Jun} and Yun-Hi Lee and Suh, {Sang Hi} and Ju, {Byeong Kwon} and Oh, {Myeong Hwan} and Oh, {Young Je} and Kim, {Tae Yoon} and Kim, {Chul Ju} and Lee, {Sung Jun}",

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T1 - Uncooled thermopile infrared detector with chromium oxide absorption layer

AU - Lee, Sung Jun

AU - Lee, Yun-Hi

AU - Suh, Sang Hi

AU - Ju, Byeong Kwon

AU - Oh, Myeong Hwan

AU - Oh, Young Je

AU - Kim, Tae Yoon

AU - Kim, Chul Ju

AU - Lee, Sung Jun

PY - 2001/12/15

Y1 - 2001/12/15

N2 - In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.

AB - In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series. We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 μm. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated.

KW - Anisotropic wet etching

KW - Electro motive force

KW - Infrared absorption

KW - Thermal isolation

KW - Thermopile

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JO - Sensors and Actuators, A: Physical

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Uncooled thermopile infrared detector with chromium oxide absorption layer

Abstract

Keywords

ASJC Scopus subject areas

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