UV nanoimprint using flexible polymer template and substrate

Sung Hoon Hong, Jae Yeon Hwang, Heon Lee, Hee Chul Lee, Kyung Woo Choi

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate.

Original languageEnglish
Pages (from-to)295-298
Number of pages4
JournalMicroelectronic Engineering
Volume86
Issue number3
DOIs
Publication statusPublished - 2009 Mar 1

Keywords

  • DLC coating
  • Flexible polymer template
  • Hot embossing
  • UV nanoimprint lithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

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