Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application

Jongseok Kim, Sangwook Kwon, Youngtack Hong, Heemoon Jeong, Sanghoon Lee, Cheheung Kim, Kyongsoo Lee, Byeong Kwon Ju, Insang Song

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A DC contact series MEMS switch for reconfigurable antenna system application is designed, fabricated, and its RF characteristics are measured. Variable pivot seesaw concept is applied because this design minimize the driving voltage and prevent stiction of membrane. The proposed switch structure is fabricated on the Si wafer, a coplanar waveguide(CPW) signal lines and electrodes are fabricated on the glass wafer. Both wafer are bonded by anodic bonding method. The designed chip size is within 2mmx2mm and it is actuated by electrostatic force. Low actuation voltage has been achieved by means of small distance between signal line and membrane using the design scheme, switching is executed in the pull-in range. Minimum actuation voltage is about 10-12V, isolation is around 50dB and insertion loss is about 0.25dB at 2GHz.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages775-778
Number of pages4
Publication statusPublished - 2007 Dec 1
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 2007 Jan 212007 Jan 25

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CountryJapan
CityKobe
Period07/1/2107/1/25

Fingerprint

pivots
microelectromechanical systems
MEMS
switches
Switches
wafers
actuation
Electric potential
electric potential
membranes
stiction
Stiction
Membranes
Telephone lines
Electrostatic force
Coplanar waveguides
Insertion losses
insertion loss
isolation
antennas

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Kim, J., Kwon, S., Hong, Y., Jeong, H., Lee, S., Kim, C., ... Song, I. (2007). Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 775-778). [4433000]

Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. / Kim, Jongseok; Kwon, Sangwook; Hong, Youngtack; Jeong, Heemoon; Lee, Sanghoon; Kim, Cheheung; Lee, Kyongsoo; Ju, Byeong Kwon; Song, Insang.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 775-778 4433000.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, J, Kwon, S, Hong, Y, Jeong, H, Lee, S, Kim, C, Lee, K, Ju, BK & Song, I 2007, Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4433000, pp. 775-778, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 07/1/21.
Kim J, Kwon S, Hong Y, Jeong H, Lee S, Kim C et al. Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 775-778. 4433000
Kim, Jongseok ; Kwon, Sangwook ; Hong, Youngtack ; Jeong, Heemoon ; Lee, Sanghoon ; Kim, Cheheung ; Lee, Kyongsoo ; Ju, Byeong Kwon ; Song, Insang. / Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. pp. 775-778
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