Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application

Jongseok Kim; Sangwook Kwon; Youngtack Hong; Heemoon Jeong; Sanghoon Lee; Cheheung Kim; Kyongsoo Lee; Byeongkwon Ju; Insang Song

Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application

Jongseok Kim, Sangwook Kwon, Youngtack Hong, Heemoon Jeong, Sanghoon Lee, Cheheung Kim, Kyongsoo Lee, Byeongkwon Ju, Insang Song

School of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

A DC contact series MEMS switch for reconfigurable antenna system application is designed, fabricated, and its RF characteristics are measured. Variable pivot seesaw concept is applied because this design minimize the driving voltage and prevent stiction of membrane. The proposed switch structure is fabricated on the Si wafer, a coplanar waveguide(CPW) signal lines and electrodes are fabricated on the glass wafer. Both wafer are bonded by anodic bonding method. The designed chip size is within 2mmx2mm and it is actuated by electrostatic force. Low actuation voltage has been achieved by means of small distance between signal line and membrane using the design scheme, switching is executed in the pull-in range. Minimum actuation voltage is about 10-12V, isolation is around 50dB and insertion loss is about 0.25dB at 2GHz.

Original language	English
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages	775-778
Number of pages	4
Publication status	Published - 2007
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 2007 Jan 21 → 2007 Jan 25

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	07/1/21 → 07/1/25

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Kim, J., Kwon, S., Hong, Y., Jeong, H., Lee, S., Kim, C., Lee, K., Ju, B., & Song, I. (2007). Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 775-778). [4433000] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. / Kim, Jongseok; Kwon, Sangwook; Hong, Youngtack et al.

Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 775-778 4433000 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kim, J, Kwon, S, Hong, Y, Jeong, H, Lee, S, Kim, C, Lee, K, Ju, B & Song, I 2007, Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4433000, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 775-778, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 07/1/21.

Kim J, Kwon S, Hong Y, Jeong H, Lee S, Kim C et al. Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 775-778. 4433000. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Kim, Jongseok ; Kwon, Sangwook ; Hong, Youngtack et al. / Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. pp. 775-778 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application",

abstract = "A DC contact series MEMS switch for reconfigurable antenna system application is designed, fabricated, and its RF characteristics are measured. Variable pivot seesaw concept is applied because this design minimize the driving voltage and prevent stiction of membrane. The proposed switch structure is fabricated on the Si wafer, a coplanar waveguide(CPW) signal lines and electrodes are fabricated on the glass wafer. Both wafer are bonded by anodic bonding method. The designed chip size is within 2mmx2mm and it is actuated by electrostatic force. Low actuation voltage has been achieved by means of small distance between signal line and membrane using the design scheme, switching is executed in the pull-in range. Minimum actuation voltage is about 10-12V, isolation is around 50dB and insertion loss is about 0.25dB at 2GHz.",

author = "Jongseok Kim and Sangwook Kwon and Youngtack Hong and Heemoon Jeong and Sanghoon Lee and Cheheung Kim and Kyongsoo Lee and Byeongkwon Ju and Insang Song",

year = "2007",

language = "English",

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note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",

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AU - Kim, Jongseok

AU - Kwon, Sangwook

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AU - Kim, Cheheung

AU - Lee, Kyongsoo

AU - Ju, Byeongkwon

AU - Song, Insang

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N2 - A DC contact series MEMS switch for reconfigurable antenna system application is designed, fabricated, and its RF characteristics are measured. Variable pivot seesaw concept is applied because this design minimize the driving voltage and prevent stiction of membrane. The proposed switch structure is fabricated on the Si wafer, a coplanar waveguide(CPW) signal lines and electrodes are fabricated on the glass wafer. Both wafer are bonded by anodic bonding method. The designed chip size is within 2mmx2mm and it is actuated by electrostatic force. Low actuation voltage has been achieved by means of small distance between signal line and membrane using the design scheme, switching is executed in the pull-in range. Minimum actuation voltage is about 10-12V, isolation is around 50dB and insertion loss is about 0.25dB at 2GHz.

AB - A DC contact series MEMS switch for reconfigurable antenna system application is designed, fabricated, and its RF characteristics are measured. Variable pivot seesaw concept is applied because this design minimize the driving voltage and prevent stiction of membrane. The proposed switch structure is fabricated on the Si wafer, a coplanar waveguide(CPW) signal lines and electrodes are fabricated on the glass wafer. Both wafer are bonded by anodic bonding method. The designed chip size is within 2mmx2mm and it is actuated by electrostatic force. Low actuation voltage has been achieved by means of small distance between signal line and membrane using the design scheme, switching is executed in the pull-in range. Minimum actuation voltage is about 10-12V, isolation is around 50dB and insertion loss is about 0.25dB at 2GHz.

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BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

Y2 - 21 January 2007 through 25 January 2007

ER -

Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application

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