Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application

Jongseok Kim, Sangwook Kwon, Youngtack Hong, Heemoon Jeong, Sanghoon Lee, Cheheung Kim, Kyongsoo Lee, Byeongkwon Ju, Insang Song

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A DC contact series MEMS switch for reconfigurable antenna system application is designed, fabricated, and its RF characteristics are measured. Variable pivot seesaw concept is applied because this design minimize the driving voltage and prevent stiction of membrane. The proposed switch structure is fabricated on the Si wafer, a coplanar waveguide(CPW) signal lines and electrodes are fabricated on the glass wafer. Both wafer are bonded by anodic bonding method. The designed chip size is within 2mmx2mm and it is actuated by electrostatic force. Low actuation voltage has been achieved by means of small distance between signal line and membrane using the design scheme, switching is executed in the pull-in range. Minimum actuation voltage is about 10-12V, isolation is around 50dB and insertion loss is about 0.25dB at 2GHz.

Original languageEnglish
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages775-778
Number of pages4
Publication statusPublished - 2007
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 2007 Jan 212007 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CountryJapan
CityKobe
Period07/1/2107/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Kim, J., Kwon, S., Hong, Y., Jeong, H., Lee, S., Kim, C., Lee, K., Ju, B., & Song, I. (2007). Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 775-778). [4433000] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).