Various metal-doped ITO as transparent conductive electrode for near-ultraviolet light emitting diodes

Min Ju Kim; Ju Hyun Park; Dong Su Jeon; Tae Ho Lee; Tae Geun Kim

doi:10.1109/CLEOPR.2015.7376173

Various metal-doped ITO as transparent conductive electrode for near-ultraviolet light emitting diodes

Min Ju Kim, Ju Hyun Park, Dong Su Jeon, Tae Ho Lee, Tae Geun Kim

School of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We fabricated under various metal doped indium tin oxide (ITO) transparent conductive electrodes (TCE) for use in near-ultraviolet (NUV) light emitting diodes (LEDs). The role of metal is to improve the transmittance especially in NUV region and current spreading of ITO. The ITO/metal (Ti, Ga, Ge, Al) TCEs (annealed at 550°C, 1 min) exhibit 90.5 ∼ 94.7% transmittance at 385 nm on the quartz substrate and the sheet resistance is ranged from 23.2 to 73.5 ω/□ on the NUV LED wafer.

Original language	English
Title of host publication	2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Volume	2
ISBN (Print)	9781467371094
DOIs	https://doi.org/10.1109/CLEOPR.2015.7376173
Publication status	Published - 2016 Jan 7
Event	11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 - Busan, Korea, Republic of Duration: 2015 Aug 24 → 2015 Aug 28

Other

Other	11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Country	Korea, Republic of
City	Busan
Period	15/8/24 → 15/8/28

Fingerprint

ASJC Scopus subject areas

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics

Cite this

Kim, M. J., Park, J. H., Jeon, D. S., Lee, T. H., & Kim, T. G. (2016). Various metal-doped ITO as transparent conductive electrode for near-ultraviolet light emitting diodes. In 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 (Vol. 2). [7376173] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2015.7376173

Various metal-doped ITO as transparent conductive electrode for near-ultraviolet light emitting diodes. / Kim, Min Ju; Park, Ju Hyun; Jeon, Dong Su; Lee, Tae Ho; Kim, Tae Geun.

2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2016. 7376173.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kim, MJ, Park, JH, Jeon, DS, Lee, TH & Kim, TG 2016, Various metal-doped ITO as transparent conductive electrode for near-ultraviolet light emitting diodes. in 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. vol. 2, 7376173, Institute of Electrical and Electronics Engineers Inc., 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015, Busan, Korea, Republic of, 15/8/24. https://doi.org/10.1109/CLEOPR.2015.7376173

@inproceedings{487c73537cac4b27b243ef08070dd15a,

title = "Various metal-doped ITO as transparent conductive electrode for near-ultraviolet light emitting diodes",

abstract = "We fabricated under various metal doped indium tin oxide (ITO) transparent conductive electrodes (TCE) for use in near-ultraviolet (NUV) light emitting diodes (LEDs). The role of metal is to improve the transmittance especially in NUV region and current spreading of ITO. The ITO/metal (Ti, Ga, Ge, Al) TCEs (annealed at 550°C, 1 min) exhibit 90.5 ∼ 94.7{\%} transmittance at 385 nm on the quartz substrate and the sheet resistance is ranged from 23.2 to 73.5 ω/□ on the NUV LED wafer.",

author = "Kim, {Min Ju} and Park, {Ju Hyun} and Jeon, {Dong Su} and Lee, {Tae Ho} and Kim, {Tae Geun}",

year = "2016",

month = "1",

day = "7",

doi = "10.1109/CLEOPR.2015.7376173",

language = "English",

isbn = "9781467371094",

volume = "2",

booktitle = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 ; Conference date: 24-08-2015 Through 28-08-2015",

}

TY - GEN

T1 - Various metal-doped ITO as transparent conductive electrode for near-ultraviolet light emitting diodes

AU - Kim, Min Ju

AU - Park, Ju Hyun

AU - Jeon, Dong Su

AU - Lee, Tae Ho

AU - Kim, Tae Geun

PY - 2016/1/7

Y1 - 2016/1/7

N2 - We fabricated under various metal doped indium tin oxide (ITO) transparent conductive electrodes (TCE) for use in near-ultraviolet (NUV) light emitting diodes (LEDs). The role of metal is to improve the transmittance especially in NUV region and current spreading of ITO. The ITO/metal (Ti, Ga, Ge, Al) TCEs (annealed at 550°C, 1 min) exhibit 90.5 ∼ 94.7% transmittance at 385 nm on the quartz substrate and the sheet resistance is ranged from 23.2 to 73.5 ω/□ on the NUV LED wafer.

AB - We fabricated under various metal doped indium tin oxide (ITO) transparent conductive electrodes (TCE) for use in near-ultraviolet (NUV) light emitting diodes (LEDs). The role of metal is to improve the transmittance especially in NUV region and current spreading of ITO. The ITO/metal (Ti, Ga, Ge, Al) TCEs (annealed at 550°C, 1 min) exhibit 90.5 ∼ 94.7% transmittance at 385 nm on the quartz substrate and the sheet resistance is ranged from 23.2 to 73.5 ω/□ on the NUV LED wafer.

UR - http://www.scopus.com/inward/record.url?scp=84964057120&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84964057120&partnerID=8YFLogxK

U2 - 10.1109/CLEOPR.2015.7376173

DO - 10.1109/CLEOPR.2015.7376173

M3 - Conference contribution

AN - SCOPUS:84964057120

SN - 9781467371094

VL - 2

BT - 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

Y2 - 24 August 2015 through 28 August 2015

ER -

Access to Document

10.1109/CLEOPR.2015.7376173