Versatile approaches to tune a nanocolumnar structure for optimized electrical properties of In2O3 based gas sensor

Soo Deok Han, Myoung Sub Noh, Sangtae Kim, Young Seok Shim, Young Geuon Song, Kwangjae Lee, Hae Ryung Lee, Sahn Nahm, Seok Jin Yoon, Jin Sang Kim, Chong-Yun Kang

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

In this study, we demonstrate tuning of electrical properties and sensing responses of In2O3 nanocolumnar structure via varying glancing angle (GLAD) deposition conditions by e-beam evaporator. The varied deposition conditions include glancing angle, vacuum level and deposition rate. The electrical property of In2O3 nanostructured thin films, demonstrated by the base resistance, change up to 3 orders of magnitude from 110 Ω to 103104 Ω depending on the porosity of nanocolumnar structure and oxygen vacancy concentration. This variation in electrical property transfers to the tuning of gas sensing response, and we achieve tuning the same material (In2O3) based gas sensors to better perform for specific type of gases (either oxidizing or reducing). The highest responses achieved in this work reached up to 176 for oxidizing gases (5 ppm NO2, Rgas/Rair) and 929 for reducing gases (50 ppm C2H5OH, Rair/Rgas). Therefore, we demonstrate that gas sensors can be optimized for specific type of target gases with the same material, via simple control of deposition conditions. Along with the high reproduciblility and sensitivity, this puts the nanocolumnar thin film based gas sensors by GLAD with huge potential for further miniaturization and mass production, suitable for the upcoming IoT era.

Original languageEnglish
Pages (from-to)894-901
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume248
DOIs
Publication statusPublished - 2017

Fingerprint

Chemical sensors
Electric properties
Gases
electrical properties
sensors
gases
Tuning
tuning
Thin films
Oxygen vacancies
Evaporators
Deposition rates
Porosity
evaporators
Vacuum
miniaturization
thin films
porosity
vacuum
sensitivity

Keywords

  • Gas sensor
  • Glancing angle deposition
  • Indium oxides
  • Internet of things
  • Nanocolumnar thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Versatile approaches to tune a nanocolumnar structure for optimized electrical properties of In2O3 based gas sensor. / Han, Soo Deok; Noh, Myoung Sub; Kim, Sangtae; Shim, Young Seok; Song, Young Geuon; Lee, Kwangjae; Lee, Hae Ryung; Nahm, Sahn; Yoon, Seok Jin; Kim, Jin Sang; Kang, Chong-Yun.

In: Sensors and Actuators, B: Chemical, Vol. 248, 2017, p. 894-901.

Research output: Contribution to journalArticle

Han, Soo Deok ; Noh, Myoung Sub ; Kim, Sangtae ; Shim, Young Seok ; Song, Young Geuon ; Lee, Kwangjae ; Lee, Hae Ryung ; Nahm, Sahn ; Yoon, Seok Jin ; Kim, Jin Sang ; Kang, Chong-Yun. / Versatile approaches to tune a nanocolumnar structure for optimized electrical properties of In2O3 based gas sensor. In: Sensors and Actuators, B: Chemical. 2017 ; Vol. 248. pp. 894-901.
@article{3c2367295b7445cf94ade41743f32675,
title = "Versatile approaches to tune a nanocolumnar structure for optimized electrical properties of In2O3 based gas sensor",
abstract = "In this study, we demonstrate tuning of electrical properties and sensing responses of In2O3 nanocolumnar structure via varying glancing angle (GLAD) deposition conditions by e-beam evaporator. The varied deposition conditions include glancing angle, vacuum level and deposition rate. The electrical property of In2O3 nanostructured thin films, demonstrated by the base resistance, change up to 3 orders of magnitude from 110 Ω to 103104 Ω depending on the porosity of nanocolumnar structure and oxygen vacancy concentration. This variation in electrical property transfers to the tuning of gas sensing response, and we achieve tuning the same material (In2O3) based gas sensors to better perform for specific type of gases (either oxidizing or reducing). The highest responses achieved in this work reached up to 176 for oxidizing gases (5 ppm NO2, Rgas/Rair) and 929 for reducing gases (50 ppm C2H5OH, Rair/Rgas). Therefore, we demonstrate that gas sensors can be optimized for specific type of target gases with the same material, via simple control of deposition conditions. Along with the high reproduciblility and sensitivity, this puts the nanocolumnar thin film based gas sensors by GLAD with huge potential for further miniaturization and mass production, suitable for the upcoming IoT era.",
keywords = "Gas sensor, Glancing angle deposition, Indium oxides, Internet of things, Nanocolumnar thin films",
author = "Han, {Soo Deok} and Noh, {Myoung Sub} and Sangtae Kim and Shim, {Young Seok} and Song, {Young Geuon} and Kwangjae Lee and Lee, {Hae Ryung} and Sahn Nahm and Yoon, {Seok Jin} and Kim, {Jin Sang} and Chong-Yun Kang",
year = "2017",
doi = "10.1016/j.snb.2017.01.108",
language = "English",
volume = "248",
pages = "894--901",
journal = "Sensors and Actuators, B: Chemical",
issn = "0925-4005",
publisher = "Elsevier",

}

TY - JOUR

T1 - Versatile approaches to tune a nanocolumnar structure for optimized electrical properties of In2O3 based gas sensor

AU - Han, Soo Deok

AU - Noh, Myoung Sub

AU - Kim, Sangtae

AU - Shim, Young Seok

AU - Song, Young Geuon

AU - Lee, Kwangjae

AU - Lee, Hae Ryung

AU - Nahm, Sahn

AU - Yoon, Seok Jin

AU - Kim, Jin Sang

AU - Kang, Chong-Yun

PY - 2017

Y1 - 2017

N2 - In this study, we demonstrate tuning of electrical properties and sensing responses of In2O3 nanocolumnar structure via varying glancing angle (GLAD) deposition conditions by e-beam evaporator. The varied deposition conditions include glancing angle, vacuum level and deposition rate. The electrical property of In2O3 nanostructured thin films, demonstrated by the base resistance, change up to 3 orders of magnitude from 110 Ω to 103104 Ω depending on the porosity of nanocolumnar structure and oxygen vacancy concentration. This variation in electrical property transfers to the tuning of gas sensing response, and we achieve tuning the same material (In2O3) based gas sensors to better perform for specific type of gases (either oxidizing or reducing). The highest responses achieved in this work reached up to 176 for oxidizing gases (5 ppm NO2, Rgas/Rair) and 929 for reducing gases (50 ppm C2H5OH, Rair/Rgas). Therefore, we demonstrate that gas sensors can be optimized for specific type of target gases with the same material, via simple control of deposition conditions. Along with the high reproduciblility and sensitivity, this puts the nanocolumnar thin film based gas sensors by GLAD with huge potential for further miniaturization and mass production, suitable for the upcoming IoT era.

AB - In this study, we demonstrate tuning of electrical properties and sensing responses of In2O3 nanocolumnar structure via varying glancing angle (GLAD) deposition conditions by e-beam evaporator. The varied deposition conditions include glancing angle, vacuum level and deposition rate. The electrical property of In2O3 nanostructured thin films, demonstrated by the base resistance, change up to 3 orders of magnitude from 110 Ω to 103104 Ω depending on the porosity of nanocolumnar structure and oxygen vacancy concentration. This variation in electrical property transfers to the tuning of gas sensing response, and we achieve tuning the same material (In2O3) based gas sensors to better perform for specific type of gases (either oxidizing or reducing). The highest responses achieved in this work reached up to 176 for oxidizing gases (5 ppm NO2, Rgas/Rair) and 929 for reducing gases (50 ppm C2H5OH, Rair/Rgas). Therefore, we demonstrate that gas sensors can be optimized for specific type of target gases with the same material, via simple control of deposition conditions. Along with the high reproduciblility and sensitivity, this puts the nanocolumnar thin film based gas sensors by GLAD with huge potential for further miniaturization and mass production, suitable for the upcoming IoT era.

KW - Gas sensor

KW - Glancing angle deposition

KW - Indium oxides

KW - Internet of things

KW - Nanocolumnar thin films

UR - http://www.scopus.com/inward/record.url?scp=85028277139&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85028277139&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2017.01.108

DO - 10.1016/j.snb.2017.01.108

M3 - Article

AN - SCOPUS:85028277139

VL - 248

SP - 894

EP - 901

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

ER -