Wafer-scale growth of MoS2 thin films by atomic layer deposition

Jung Joon Pyeon, Soo Hyun Kim, Doo Seok Jeong, Seung Hyub Baek, Chong Yun Kang, Jin Sang Kim, Seong Keun Kim

Research output: Contribution to journalArticlepeer-review

111 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds