Wavelet monitoring of plasma etching

Byungwhan Kim, Won Sun Choi, Myo Teak Lim

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)2329-2333
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
Publication statusPublished - 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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